Journal of Vacuum Science and Technology

The name Journal of Vacuum Science and Technology (JVST) combines two scientific journals, JVST A and JVST B, published by the American Vacuum Society since 1964.

1964-1982 Journal of Vacuum Science and Technology [0022-5355]

1983-present Journal of Vacuum Science & Technology. A. Vacuum, surfaces, and films

1983-1990 Journal of Vacuum Science & Technology. B, Microelectronics processing and phenomena

1991-present Journal of Vacuum Science & Technology. B, Microelectronics and nanometer structures

JVST A

Journal of Vacuum Science and Technology A specializes in applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology.

Editor: G. Lucovsky, Department of Physics, North Carolina State University.

Contnent of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTAD6

JVST B

Journal of Vacuum Science and Technology B specializes in vacuum processing and plasma processing of various materials, the structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices.

Editor: Gary E. McGuire, International Technology Center link required.

Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9

External links

Homepage of JVSTA: http://scitation.aip.org/jvsta
Homepage of JVSTB: http://www.avs.org/literature.jvst.b.aspx

Fuente: http://en.wikipedia.org/wiki/Journal_of_Vacuum_Science_and_Technology
Nombre: Juan J. Núñez C.
Materia: CRF
Sección: 01
Leer:[Jn10:14]